STRESSES IN THIN FILM MULTILAYER INTERCONNECT STRUCTURES

STRESSES IN THIN FILM MULTILAYER INTERCONNECT STRUCTURES

著者名:

掲載資料名:

Electronic packaging materials science VI : symposium held April 27-30, 1992, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

264

発行年:

1992

開始ページ:

251

終了ページ:

256

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991699 [1558991697]

言語:

英語

請求記号:

M23500/264

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015748
シリーズID:	PA00000011
会議名:	Symposium on electronic packaging materials science
回次:	6th
会議開催地:	San Francisco, CA, USA
会議開催年:	1992.04.27-1992.04.30

類似資料:

1 国際会議録 Textures in Thin Films Knorr,D.B. Trans Tech Publications	7 国際会議録 (373f) Molecular Energy Dissipation in Organic Compliant Viscous Thin Film Materials Daniel B. Knorr Jr., Rene M. Overney American Institute of Chemical Engineers
2 国際会議録 Texture and Grain Structure Effects on the Reliability of Microelectronic Interconnects Knorr,D.B., Rodbell,K.P. Trans Tech Publications	8 国際会議録 COHERENCY STRESSES IN Mo/Ni MULTILAYER FILMS Bain, J. A., Chyung, L. J., Brennan, S., Clemens, B. M. Materials Research Society
3 国際会議録 CORRELATION OF THE STRESS-TEMPERATURE HISTORY WITH MICROSTRUCTURE IN Al-0.5Cu AND Al-0.15Pd THIN FILMS Knorr, D. D., Rodbell, K. P. MRS - Materials Research Society	9 国際会議録 STRUCTURAL PROPERTIES OF Pd/V MULTILAYER THIN FILMS Lewen, G. D., Stearns, M. B. Materials Research Society
4 国際会議録 DEPOSITION, STRUCTURAL CHARACTERIZATION, AND BROADBAND (1KHz-40GHz) DIELECTRIC BEHAVIOR OF BaxTi2-xOy THIN FILMS Liu, W. -T., Cochrane, S., Beckage, P., Knorr, D. B., Lu, T. -M., Borrego, J. M., Rymaszewski, E. J. MRS - Materials Research Society	10 国際会議録 The Influence of Texture and Grain Boundary Character Distribution on the Reliability of Aluminum Thin Films Lee,K.T., Szpunar,J.A., Knorr,D.B. Trans Tech Publications
5 国際会議録 Textures of Aluminum and Copper Thin Films Knorr,D.B., Tracy,D.P. Trans Tech Publications	11 国際会議録 On the Measurement of Residual Stress in Thin Films Zhao, Z. B., Hershberger, J., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society
6 国際会議録 Characterization of Multilayer Thin Film Structures for Gas Sensor Applications Dibattista, M., Patel, S. V., Wise, K. D., Gland, J. L., Mansfield, J. F., Schwank, J. W. MRS - Materials Research Society	12 国際会議録 Deposition of functionalized nanoparticles in multilayer thin-film structures by resonant infrared laser ablation M. R. Papantonakis, E. Herz, D. L. Simonson, U. B. Wiesner, R. F. H. Jr. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12