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VLPCVD HETEROEPITAXIAL GROWTH OF VERY THIN Ge-LAYERS ON Si-SUBSTRATES

著者名:
Caymax,. Matty R.
Poortmans, J.
Van Ammel, A.
Nijs, J.
Vandervorst, W.
Vanhellemont, J.
Brijs, B.
さらに 2 件
掲載資料名:
Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
263
発行年:
1992
開始ページ:
85
終了ページ:
90
総ページ数:
6
出版情報:
Pittsburgh, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558991583 [1558991581]
言語:
英語
請求記号:
M23500/263
資料種別:
国際会議録

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