*DEFECT ANALYSIS IN VLSI DEVICES BY TEM OBSERVATION AND PROCESS SIMULATION
- 著者名:
Mikoshiba,. H. Nishio,. N. Matsumoto, T. Kikuchi, H. Kitano, T. Kaneko, H. - 掲載資料名:
- Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 262
- 発行年:
- 1992
- 開始ページ:
- 629
- 終了ページ:
- 640
- 総ページ数:
- 12
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991576 [1558991573]
- 言語:
- 英語
- 請求記号:
- M23500/262
- 資料種別:
- 国際会議録
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