LOCAL BONDING STRUCTURE OF HYDROGEN IN CRYSTALLINE SILICON: NMR AND TEM STUDIES

LOCAL BONDING STRUCTURE OF HYDROGEN IN CRYSTALLINE SILICON: NMR AND TEM STUDIES

著者名:

掲載資料名:

Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

262

発行年:

1992

開始ページ:

401

終了ページ:

406

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991576 [1558991573]

言語:

英語

請求記号:

M23500/262

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015746
シリーズID:	PA00000011
会議名:	Symposium on defect engineering in semiconductor growth, processing and device technology
回次:	1992
会議開催地:	San Francisco, CA, USA
会議開催年:	1992.04.26-1992.05.01

類似資料:

1 国際会議録 NMR Detection of New Hydrogen Populations in Amorphous and Crystalline Silicon Borzi, R., Cull, T. S., Fedders, P. A., Leopold, D. J., Norberg, R. E., Boyce, J. B., Johnson, N. M., Ready, S. E., … MRS - Materials Research Society	7 国際会議録 THE STRUCTURE OF THE BORON-HYDROGEN COMPLEX IN SILICON Marwick, A. D., Oehrlein, G. S., Barrett, J. H., Johnson, N. M. Materials Research Society
2 国際会議録 HYDROGEN BONDING IN a-Si:H PREPARED BY REMOTE HYDROGEN PLASMA DEPOSITION Ready, S. E., Boyce, J. B., Johnson, N. M., Walker, J., Steveas, K. S. Materials Research Society	8 国際会議録 Large grain creation and destruction in excimer laser crystallized amorphous silicon Boyce, J. B., Anderson, G. B., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E. MRS - Materials Research Society
3 国際会議録 NMR INVESTIGATION OF THE LOCAL DOPANT-HYDROGEN CONFIGURATION IN AMORPHOUS SILICON Ready, S. E., Boyce, J. B. Materials Research Society	9 国際会議録 CHARACTERIZATION OF THE SUBSTRATE INTERFACE OF EXCIMER LASER CRYSTALLIZED POLYCRYSTALLINE SILICON THIN FILMS Anderson, G. B., Boyce, J. B., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E. MRS - Materials Research Society
4 国際会議録 STRUCTURE OF HYDROGEN IN MICROCRYSTALLINE AND AMORPHOUS SILICON: AN NMR COMPARISON Ready, S.E., Boyce, J.B., Tsai, C.C. Materials Research Society	10 国際会議録 LOW TEMPERATURE CRYSTALLIZATION OF AMORPHOUS SILICON FILMS USING AN EXCIMER LASER Ready, S. E., Boyce, J. B., Bachrach, R. Z., Johnson, R. I., Winer, K., Anderson, G., Tsai, C. C. Materials Research Society
5 国際会議録 Hydrogen-induced platelets in silicon:separation of nucleation and growth Johnson,N.M., Herring,C., Doland,C., Walker,J., Anderson,G., Ponce,F. Trans Tech Publications	11 国際会議録 EXCIMER LASER CRYSTALLIZED AMORPHOUS SILICON FILMS: EFFECTS OF SHOT DENSITY AND SUBSTRATE TEMPERATURE Johnson, R.I., Anderson, G.B., Ready, S.E., Boyce, J.B. Materials Research Society
6 国際会議録 NMR Investigation of Paired Hydrogen Atoms in Plasma-Deposited Amorphous Silicon Boyce B. J. Plenum Press	12 国際会議録 LASER DOPING AND CRYSTALLIZATION OF AMORPHOUS SILICON THIN FILMS Boyce, J. B., Anderson, G. B., Carey, P. G., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E., Smith, P. M. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12