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*SURFACE CONDITIONING ISSUES RELATED TO PATTERNING AND ETCHING

著者名:
Fonash, S.J.
Ditizio, R.A.
Gu, T.
Mikulan, P.I.
Awadelkarim, O.O.
Collins, R.W.
Rembetski, J.F.
Reinhardt, K.A.
Chan, Y.D.
さらに 4 件
掲載資料名:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
259
発行年:
1992
開始ページ:
55
終了ページ:
68
総ページ数:
14
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991545 [1558991549]
言語:
英語
請求記号:
M23500/259
資料種別:
国際会議録

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