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GROWTH OF Ge/Si AMORPHOUS SUPERLATTICES BY DUAL-TARGET DC MAGNETRON SPUTTERING

著者名:
Jarrendahl, K.
Birch, J.
Hultman, L.
Wallenberg, L.R.
Radnoczi, G.
Arwin, H.
Sundgren, J-E.
さらに 2 件
掲載資料名:
Amorphous silicon technology, 1992
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
258
発行年:
1992
開始ページ:
571
終了ページ:
576
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991538 [1558991530]
言語:
英語
請求記号:
M23500/258
資料種別:
国際会議録

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