GROWTH AND STRUCTURE OF MICROCRYSTALLINE SILICON BY REACTIVE DC MAGNETRON SPUTTERING

GROWTH AND STRUCTURE OF MICROCRYSTALLINE SILICON BY REACTIVE DC MAGNETRON SPUTTERING

著者名:

掲載資料名:

Amorphous silicon technology, 1992

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

258

発行年:

1992

開始ページ:

179

終了ページ:

184

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991538 [1558991530]

言語:

英語

請求記号:

M23500/258

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015742
シリーズID:	PA00000011
会議名:	Amorphous Silicon Technology : Symposium
回次:	1992
会議開催地:	San Francisco, CA, USA
会議開催年:	1992.04.27-1992.05.01

類似資料:

1 国際会議録 MICROCRYSTALLINE SILICON BY DC MAGNETRON SPUTTERING: GROWTH MECHANISMS Feng, G.F., Katiyar, M., Yang, Y.H., Abelson, J.R., Maley, N. Materials Research Society	7 国際会議録 MICROSTRUCTURAL AND ELECTRONIC PROPERTIES OF HYDROGENATED AMORPHOUS SILICON FILMS DEPOSITED BY MAGNETRON REACTIVE SPUTTERING Pinarbasi, M., Maley, N., Myers, A., Szafranek, I., Abelson, J.R., Thornton, J.A. Materials Research Society
2 国際会議録 SUBSTRATE INDUCED CRYSTALLIN1TY IN REACTIVE SPUTTER DEPOSITION OF HYDROGENATED SILICON Feng, G.F., Katiyar, M., Abelson, J.R., Maley, N. Materials Research Society	8 国際会議録 *REACTIVE MAGNETRON SPUTTERING: IN SITU ANALYSES OF PARTICLE FLUXES AND INTERACTIONS WITH THE GROWTH SURFACE Abelson, J. R., Doyle, J. R., Mandrell, L., Maley, N. Materials Research Society
3 国際会議録 ELLIPSOMETRY STUDIES OF (μc-Si:H/ZnO) AND (μc-Si:H/a-Si:H) INTERFACES IN MAGNETRON SPUTTERING SYSTEM Yang, Y.H., Katiyar, M., Abelson, J.R., Maley, N. Materials Research Society	9 国際会議録 IN SITU IR ABSORPTION STUDY OF H BONDING IN a-Si:H THIN FILMS Katiyar, M., Feng, G.F., Abelson, J.R., Maley, N. Materials Research Society
4 国際会議録 HIGH SUBSTRATE TEMPERATURE a-Si:H GROWN BY DC REACTIVE MAGNETRON SPUTTERING Liang, Y.H., Maley, N., Abelson, J.R. Materials Research Society	10 国際会議録 CARRIER TRANSPORT PROPERTIES OF DC MAGNETRON REACTIVE SPUTTERED a-Si:H FILMS Pinarbasi, M., Maley, N., Abelson, J. R., Chu, V., Wagner, S. Materials Research Society
5 国際会議録 IN-SITU ELLIPSOMETRY STUDY OF ION BOMBARDMENT EFFECTS ON LOW TEMPERATURE Si EPITAXY BY dc MAGNETRON SPUTTERING Yang, Y. H., Feng, G. F., Katiyar, M., Abelson, J. R. MRS - Materials Research Society	11 国際会議録 THE RELATION BETWEEN MICROSTRUCTURE AND ELECTRONIC PROPERTIES OF MAGNETRON SPUTTERED a-Si1-X,CX:H Yang, S.-Y., Maley, N., Abelson, J.R. Materials Research Society
6 国際会議録 IN SITU MEASUREMENTS OF HYDROGEN FLUX, SURFACE COVERAGE, INCORPORATION AND DESORPTION DURING MAGNETRON SPUTTER-DEPOSITION OF a-Si:H Abelson, J.R., Maley, N., Doyle, J.R., Feng, G.F., Fitzner, M., Katiyar, M., Mandrell, L., Myers, A.M., Nuruddin, A., … Materials Research Society	12 国際会議録 SMALL-ANGLE X-RAY SCATTERING FROM a-Si:H AND a-SiC:H ALLOYS PREPARED BY REACTIVE DC MAGNETRON SPUTTERING Chen, Y., Jones, S.J., Williamson, D.L., Yang, S., Maley, N., Abelson, J.R. Materials Research Society

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