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COMPARISON OF a-Si:H FILMS PREPARED BY RP- AND CONVENTIONAL P-CVD

著者名:
Kim, S.C.
Park, K.C.
Kim, S.K.
Kim, T.G.
Pyun, J.S.
Jun, J.M.
Jang, J.
さらに 2 件
掲載資料名:
Amorphous silicon technology, 1992
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
258
発行年:
1992
開始ページ:
51
終了ページ:
56
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991538 [1558991530]
言語:
英語
請求記号:
M23500/258
資料種別:
国際会議録

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