OPTICAL WAVEGUIDES IN THERMALLY GROWN SiO2 ON Si USING NITROGEN ION IMPLANTATION

OPTICAL WAVEGUIDES IN THERMALLY GROWN SiO2 ON Si USING NITROGEN ION IMPLANTATION

著者名:

掲載資料名:

Optical waveguide materials : symposium held December 2-4, 1991, Boston, Massachusette, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

244

発行年:

1992

開始ページ:

375

終了ページ:

380

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991385 [1558991387]

言語:

英語

請求記号:

M23500/244

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015728
シリーズID:	PA00000011
会議名:	Symposium on optical waveguide materials
回次:	1991
会議開催地:	Boston, MA, USA
会議開催年:	1991.12.02-1991.12.04

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