PREPARATION OF EPITAXIAL BaTiO3 THIN FILMS BY PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR DEPOSITION (PE-MOCVD)
- 著者名:
Chern, C.S. Norris, P.E. Li, Y.Q. Gallois, B. Kear, B. Luo, L. Maggiore, C.J. Wilkens, B.J. - 掲載資料名:
- Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 243
- 発行年:
- 1992
- 開始ページ:
- 573
- 終了ページ:
- 578
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991378 [1558991379]
- 言語:
- 英語
- 請求記号:
- M23500/243
- 資料種別:
- 国際会議録
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12
国際会議録
Metalorganic Chemical Vapor Deposition (MOCVD) of Aluminum from Dimethylethvlamine Alane (DMEAA)
Electrochemical Society |