THE ROLE OF THE LEAD ZIRCONATE TITANATE (PZT)-Pt INTERFACE IN THE ANOMALOUS PHASE TRANSFORMATION KINETICS IN SPUTTERED PZT THIN FILM CAPACITORS AT SUB-2000 A THICKNESS
- 著者名:
Chikarmane, V. Kim, J. Sudhama, C. Lee, J. Tasch, A. Novak, S. - 掲載資料名:
- Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 243
- 発行年:
- 1992
- 開始ページ:
- 367
- 終了ページ:
- 372
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991378 [1558991379]
- 言語:
- 英語
- 請求記号:
- M23500/243
- 資料種別:
- 国際会議録
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7
国際会議録
CHARACTERIZATION OF LEAD ZIRCONATE TITANATE (PZT)-INDIUM TIN OXIDE (ITO) THIN FILM INTERFACE
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12
テクニカルペーパー
Sputtered Barium Titanate, Lead Zirconate Titanate, Barium Btrontium Titanate Films for Capacitor Applications
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