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PLASMA ENHANCED MOCVD OF BaTiO3 FILMS

著者名:
掲載資料名:
Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
243
発行年:
1992
開始ページ:
223
終了ページ:
228
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991378 [1558991379]
言語:
英語
請求記号:
M23500/243
資料種別:
国際会議録

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