PREPARATION AND MICROSTRUCTURAL CHARACTERIZATION OF FERROELECTRIC THIN FILM PbTiO3 ON Si, MgO, AND SAPPHIRE DEPOSITED BY DC REACTIVE MULTITARGET CO-SPUTTERING

PREPARATION AND MICROSTRUCTURAL CHARACTERIZATION OF FERROELECTRIC THIN FILM PbTiO3 ON Si, MgO, AND SAPPHIRE DEPOSITED BY DC REACTIVE MULTITARGET CO-SPUTTERING

著者名:

掲載資料名:

Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

243

発行年:

1992

開始ページ:

197

終了ページ:

202

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991378 [1558991379]

言語:

英語

請求記号:

M23500/243

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015727
シリーズID:	PA00000011
会議名:	Symposium on ferroelectric thin films
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1991.12.02-1991.12.04

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