NON-CONTACT, WAFER-SCALE DEEP LEVEL TRANSIENT SPECTROS COPY (DLTS) BASED ON SURFACE PHOTOVOLTAGE (SPV)

NON-CONTACT, WAFER-SCALE DEEP LEVEL TRANSIENT SPECTROS COPY (DLTS) BASED ON SURFACE PHOTOVOLTAGE (SPV)

著者名:

掲載資料名:

Advanced III-V compound semiconductor growth, processing and devices : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

240

発行年:

1992

開始ページ:

129

終了ページ:

134

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991347 [1558991344]

言語:

英語

請求記号:

M23500/240

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015724
シリーズID:	PA00000011
会議名:	Symposium on advanced III-V compound semiconductor growth, processing and devices
回次:	1991
会議開催地:	Boston, MA, USA
会議開催年:	1991.12.02-1991.12.05

類似資料:

1 国際会議録 NON-CONTACT, NO WAFER PREPARATION DEEP LEVEL, TRANSIENT SPECTROSCOPY (DLTS) BASED ON SURFACE PHOTOVOLTAGE (SPV) Lagowski, Jacek, Edelman,. Piotr, Dexter, Mark Materials Research Society	7 国際会議録 SURFACE PHOTOVOLTAGE MEASUREMENT OF MINORITY CARRIER DIFFUSION LENGTHS EXCEEDING WAFER THICKNESS: APPLICATION TO IRON MONITORING WITH PART PER QUADILLION … Kontkiewicz, A. M., Lagowski, J., Dexter, M., Edelman, P. MRS - Materials Research Society
2 国際会議録 SURFACE CHARGE IMAGING IN SEMICONDUCTOR WAFERS BY SURFACE PHOTOVOLTAGE (SPV)_ Edelman,. Piotr, Lagowski, Jacek, Jastrzebski, Lubek Materials Research Society	8 国際会議録 Recent Refinements in the Surface Photovoltage Method for Measuring Very Long Minority Carrier Diffusion Length Lagowski, J., Faifer, V., Edelman, P. Electrochemical Society
3 国際会議録 Non-Contact Mapping of Fe Contamination in Oxidized Si Wafers With Sensitivity in Part-Per-Trillion Range Lagowski, Jacek, Edelman, Piotr MRS - Materials Research Society	9 国際会議録 POROUS SILICON LUMINESCENCE STUDY BY IMAGING METHODS: RELATIONSHIP TO PORE DIMENSIONS Kontkiewicz, Anna, Kontkiewicz, Andrzej M., Sen, Sidhartha, Wesolowski, Marek, Lagowski, Jacek, Edelman, Piotr, … MRS - Materials Research Society
4 国際会議録 CONTAMINATION MONITORING USING SURFACE PHOTOVOLTAGE AND APPLICATION TO PROCESS LINE CONTROL Jastrzebski, Lubek, Lagowski, Jacek, Henley, Worth, Edelman, Piotr MRS - Materials Research Society	10 国際会議録 Small signal AC-surface photovoltage technique for non-contact monitoring of near surface doping and recombination-generation in the depletion layer Marinskiy, D., Lagowski, J., Wilson, M., Savtchouk, A., Jastrzebski, L., DeBusk, D. MRS-Materials Research Society
5 国際会議録 New surface photovoltage (SPV) method for high precision measurement of the minority carrier diffusion length and surface recombination velocity in silicon … Faifer, V., Edelman, P., Kontkiewicz, A., Lagowski, J., Hoff, A., Dyukov, V., Pravdivtsev, A., Kornienko, I. Electrochemical Society	11 国際会議録 Diagnostics of Semiconductor Surface by Laser-Induced Photovoltage Pohoryles,B., Morawski,A. Trans Tech Publications
6 国際会議録 Fully Automated SPV Mapping of Iron in Silicon Wafers for In-Line Contamination Monitoring Lagowski, J., Edelman, P. Electrochemical Society	12 国際会議録 Non-Contact Full Wafer Evaluation of Deep Levels in Silicon Via Temperature Dependent Surface Recombination Velocity, and Carrier Lifetime Buczkowski, A., Rozgonyi, G.A., Shimura, F. Electrochemical Society

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