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GROWTH MECHANISM AND FILM PROPERTIES IN PULSED LASER-PLASMA DEPOSITION

著者名:
掲載資料名:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
236
発行年:
1992
開始ページ:
417
終了ページ:
422
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991309 [1558991301]
言語:
英語
請求記号:
M23500/236
資料種別:
国際会議録

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