GROWTH AND MICROSTRUCTURE OF ALUMINUM NITRIDE THIN FILMS
- 著者名:
Norton, M. Grant Kotula, Paul G. Li, Jian McKernan, Stuart Cracknell, , Kathryn P. B. Carter, C. Barry Mayer, James W. - 掲載資料名:
- Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 226
- 発行年:
- 1991
- 開始ページ:
- 209
- 終了ページ:
- 214
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991200 [1558991204]
- 言語:
- 英語
- 請求記号:
- M23500/226
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
7
国際会議録
INTERFACIAL REACTIONS DURING PROCESSING OF THIN NICKEL OXIDE FILMS GROWN BY PULSED-LASER ABLATION
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |