COMPUTER SIMULATION OF GRAIN GROWTH IN THIN-FILM INTERCONNECT LINES

COMPUTER SIMULATION OF GRAIN GROWTH IN THIN-FILM INTERCONNECT LINES

著者名:

掲載資料名:

Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

225

発行年:

1991

開始ページ:

219

終了ページ:

224

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991194 [1558991190]

言語:

英語

請求記号:

M23500/225

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015709
シリーズID:	PA00000011
会議名:	Symposium on materials reliability issues in microelectronics
回次:	1991
会議開催地:	Anaheim, CA, USA
会議開催年:	1991.04.30-1991.05.03

類似資料:

1 国際会議録 THE EFFECT OF SOLUTE DRAG ON GRAIN GROWTH IN THIN FILMS Frost, H. J., Hayashi, Y., Thompson, C. V., Walton, D. T. MRS - Materials Research Society	7 国際会議録 Modelling of Grain Structure Evolution and its Impact on the Reliability of Al(Cu) Thin Film Interconnects Riege, S. P., Andleigh, V., Thompson, C. V., Frost, H. J. MRS - Materials Research Society
2 国際会議録 GRAIN GROWTH IN THIN FILMS WITH VARIABLE GRAIN BOUNDARY ENERGY Frost, H. J., Hayashi, Y., Thompson, C. V., Walton, D. T. MRS - Materials Research Society	8 国際会議録 Grain Structure Statistics in As-Patterned and Annealed Interconnects Fayad, W., Andleigh, V., Thompson, C. V., Frost, H. J. MRS - Materials Research Society
3 国際会議録 Modelling of Grain Growth in Thin Film Strips Walton,D.T., Frost,H.J., Thompson,C.V. Trans Tech Publications	9 国際会議録 Grain Orientation Mapping of Passivated Aluminum Interconnect Lines With X-ray Microdiffraction MacDowell, A. A., Chang, C. H., Padmore, H. A., Patel, J. R., Thompson, A, C. MRS - Materials Research Society
4 国際会議録 Abnormal Grain Growth in Thin Films due to Anisotropy of Free-Surface Energies Frost,H.J., Thompson,C.V., Walton,D.T. Trans Tech Publications	10 国際会議録 Mechanisms of Grain Growth in Bubble-Fence-Delineated Films Townsend, S. J., Frost, H. J., Nichols, C. S. MRS - Materials Research Society
5 国際会議録 COMPUTER SIMULATION OF STRAIN ENERGY AND SURFACE- AND INTERFACE-ENERGY ON GRAIN GROWTH IN THIN FILMS Carel, R., Thompson, C. V., Frost, H. J. MRS - Materials Research Society	11 国際会議録 EPITAXIAL GRAIN GROWTH AND ORIENTATION METASTABILITY IN HETEROEPITAXIAL THIN FILMS Floro, J. A., Thompson, C. V. Materials Research Society
6 国際会議録 MODELLING OF THIN FILM GRAIN STRUCTURES AND GRAIN GROWTH Frost, H.J., Thompson, C.V. Materials Research Society	12 国際会議録 Secondary Grain Growth in Thin Films Thompson, C. V., Smith, Henry I. Materials Research Society

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