Blank Cover Image

CARBON FILM DEPOSITION ON SILICON USING LOW ENERGY ION BEAMS

著者名:
Fuguang, Qin
Zhenyu, Yao
Zhizhang, Ren
Lee, S. -T.
Bello, I.
Feng, X.
Huang, L. J.
Lau, W. M.
さらに 3 件
掲載資料名:
Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
223
発行年:
1991
開始ページ:
307
終了ページ:
314
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991170 [1558991174]
言語:
英語
請求記号:
M23500/223
資料種別:
国際会議録

類似資料:

1 国際会議録 LOW ENERGY FLUOROBORON ION BEAM INTERACTION WITH SILICON SINGLE CRYSTALS

Huang, L.J., Lau, W.M., Mitchell, I.V., Le, S.-T.

Materials Research Society
7 国際会議録 *DIRECT FORMATION OF THIN FILMS AND EPITAXIAL OVERLAYERS AT LOW TEMPERATURES USING A LOW-ENERGY (10-500 eV) ION BEAM DEPOSITION SYSTEM

Zuhr, R. A, Alton, G. D., Appleton, B. R., Herbots, N., Noggle, T. S., Pennycook, S. J.

Materials Research Society
2 国際会議録 Ion-Assisted Deposition Of Silicon Epitaxial Films With High Deposition Rate Using Low Energy Silicon Ions

Bergmann, R. B., Oberbeck, L., Wagner, T. A.

Materials Research Society
8 国際会議録 The Study of Ion Beam Assisted Deposition of CuInSe2 Absorber Films

X.L. Li, Y.D. Feng, H. Wang

Trans Tech Publications
3 国際会議録 ULTRATHIN NITRIDE FILMS GROWN UNDER LOW-ENERGY ION BOMBARDMENT

Ren, Zhong-Min, Ying, Zhi-Feng, Xiong, Xia-Xing, He, Mao-Qi, Du, Yuan-Cheng, Chen, Liang-Yao, Li, Fu-Ming

MRS - Materials Research Society
9 国際会議録 Low Temperature Deposition of Zinc Oxide Films

Lee, H. W., Wang, Y. G., Lau, S. P., Tay, B. K.

Materials Research Society
4 国際会議録 Composite nanowires from ion beam modification of Si nanowires

Zhou, X. T., Peng, H. Y., Shang, N. G., Wang, N., Bello, I., Lee, C. S., Lee, S. T.

MRS-Materials Research Society
10 国際会議録 THE EFFECTS OF ION ENERGY ON CARBON AND TUNGSTEN FILMS FABRICATED BY DIRECT ION BEAM DEPOSITION AND ION BEAM SPUTTERING DEPOSITION

Kataoka, I., Ito, K., Hoshi, N., Yonemitsu, T., Etoh, K., Yamada, I., Delaunay, Jean-Jacques

Materials Research Society
5 国際会議録 Fabrication of Epitaxial Silicides Thin Films by Combining Low-Energy Ion Beam Deposition and Silicon Melecular Beam Epitaxy

Shibata, H., Makita, Y., Katsumata, H., Kimura, S., Kobayashi, N., Hasegawa, M., Hishita, S., Beye, A. C., Takahashi, …

MRS - Materials Research Society
11 国際会議録 Development of low temperature silicon nitride and silicon dioxide films by inductively-coupled plasma chemical vapor deposition

Lee, J.W., Mackenzie, K.D., Johnson, D., Pearton, S.J., Ren, F., Sasserath, J.N.

Materials Research Society
6 国際会議録 A Review of the Ion Beam Assisted Deposition Researches towards Industrialization for the Second Generation High Temperature Superconducting Wire Fabrication

F. Feng, T.M. Qu, K. Shi, R.X. Huang, W. Wu

Trans Tech Publications
12 国際会議録 HETEROEPITAXY ON GaAs ON Si AND Ge BY LOW-ENERGY ION BEAM DEPOSITION USING ALTERNATING BEAMS

Haynes, T. E., Zuhr, R. A., Pennycook, S. J,.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12