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DEPOSITION OF ALUMINUM NITRIDE FILM BY ION BEAM ENHANCED REACTIVE MAGNETRON SPUTTERING

著者名:
掲載資料名:
Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
223
発行年:
1991
開始ページ:
289
終了ページ:
294
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991170 [1558991174]
言語:
英語
請求記号:
M23500/223
資料種別:
国際会議録

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