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*REAL-TIME OPTICAL DIAGNOSTICS FOR MEASURING AND CONTROLLING EPITAXIAL GROWTH

著者名:
Aspnes, D. E.
Bhat, R.
Colas, E.
Florez, L. T.
Gregory, S.
Harbison, J. P.
Kamiya, I.
Quinn, W. E.
Schwarz, S. A.
Tanaka, H.
Wassermeier, M.
さらに 6 件
掲載資料名:
Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
222
発行年:
1991
開始ページ:
63
終了ページ:
74
総ページ数:
12
出版情報:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9781558991163 [1558991166]
言語:
英語
請求記号:
M23500/222
資料種別:
国際会議録

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