HETEROEPITAXIAL GROWTH AND CHARACTERIZATION OF TITANIUM FILMS ON ALPHA (6H) SILICON CARBIDE

HETEROEPITAXIAL GROWTH AND CHARACTERIZATION OF TITANIUM FILMS ON ALPHA (6H) SILICON CARBIDE

著者名:

Spellman, L. M.

Chevacharoenkul, Sopa

Parikh, N. R.

さらに 3 件

掲載資料名:

Heteroepitaxy of dissimilar materials : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

221

発行年:

1991

開始ページ:

99

終了ページ:

104

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991156 [1558991158]

言語:

英語

請求記号:

M23500/221

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015705
シリーズID:	PA00000011
会議名:	Symposium on heteroepitaxy of dissimilar materials
回次:	1991
会議開催地:	Anaheim, CA, USA
会議開催年:	1991.04.29-1991.05.02

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