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SYNTHESIS OF NEW COPPER(I) β-DIKETONATE COMPOUNDS FOR CVD OF COPPER

著者名:
Shin, H.K.
Chi, K.-M.
Hampden-Smith, M.J.
Kodas, T.T.
Farr, J.D.
Paffett, M.F.
さらに 1 件
掲載資料名:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
204
発行年:
1991
開始ページ:
421
終了ページ:
426
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990968 [1558990968]
言語:
英語
請求記号:
M23500/204
資料種別:
国際会議録

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