Blank Cover Image

CoSi2 PRECIPITATE COARSENING DURING FORMATION OF BURIED EPITAXIAL CoSi2 LAYERS BY ION BEAM SYNTHESIS

著者名:
Jebasinski, R.
Mantl, S.
Radermacher, K.
Fichtner, P.
Jager, W.
Buchal, Ch.
さらに 1 件
掲載資料名:
Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
201
発行年:
1991
開始ページ:
411
終了ページ:
416
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990074 [1558990070]
言語:
英語
請求記号:
M23500/201
資料種別:
国際会議録

類似資料:

1 国際会議録 THICKNESS DEPENDENCE OF ELECTRICAL TRANSPORT IN BURIED CoSi2 FILMS FABRICATED BY ION BEAM SYNTHESIS

Radermacher, K., Jebasinski, R., Mantl, S., Monroe, D., White, A. E., Short, K. T.

MRS - Materials Research Society
7 国際会議録 ELECTRICAL AND OPTICAL PROPERTIES OF FeSi2 LAYERS

Radermacher, K., Skeide, O., Carius, R., Klomfass, J., Mantl, S.

MRS - Materials Research Society
2 国際会議録 ION BEAM SYNTHESIS OF BURIED CoSi2 LAYERS IN SiGe ALLOYS

Jebasinski, R., Mantl, S., Dieker, Chr., Dederichs, H., Vescan, L., Butz, R.

Materials Research Society
8 国際会議録 ON THE INTERFACE STRUCTURE OF BURIED CoSi2/Si(001) LAYERS AND THEIR RESPECTIVE SCHOTTKY BARRIER HEIGHTS

Werner, P., Jager, W., Schuppen, A.

MRS - Materials Research Society
3 国際会議録 Ion Beam Synthesis of Buried Ion Disilicide

Radermacher K., Mantl S., Apetz R., Dieker C., Luth H.

Kluwer Academic Publishers
9 国際会議録 FORMATION OF A BURIED STACKED INSULATOR BY ION BEAM SYNTHESIS

Skorupa, W., Grotzschel, R., Wollschlager, K., Albrecht, J., Vohse, H.

Materials Research Society
4 国際会議録 GROWTH OF ION IMPLANTED BURIED FeSi2 ON Si(111) AND Si(100)

Radermacher, K., Mantl, S., Dieker, Ch., Holzbrecher, H., Speier, W., Luth, H.

Materials Research Society
10 国際会議録 SMOOTH SILICIDE FORMATION BY ION BEAM MIXING OF Ti/Si-LAYERS

Kohlhof, K., Mantl, S., Stritzker, B.

Materials Research Society
5 国際会議録 FORMATION OF BURIED EPITAXIAL Co SILICIDES BY ION IMPLANTATION

Kohlhof K., Mantl S., Strizker B.

Kluwer Academic Publishers
11 国際会議録 CHANNELING INVESTIGATION OF THE LATTICE LOCATION OF Ti IN Ti-IMPLANTED OPTICAL WAVEGUIDES IN LiNbO3

Buchal, Ch., Mantl, S., Thomas, D. K.

Materials Research Society
6 国際会議録 GROWTH OF BURIED CoSi2 LAYERS IN Si(100) BY MOLECULAR BEAM ALLOTAXY

Mantl, S., Bay, H. L., Michel, I., Mesters, S., Trinkaus, H.

MRS - Materials Research Society
12 国際会議録 Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation

Wong, S. P., Peng, Qicai, Cheung, W. Y., Guo, W. S., Xu, J. B., Wilson, I. H., Hark, S. K., Morton, R., Lau, S. S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12