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*Preparation of Cross Sectional TEM Samples Using Lithographic Techniques and Reactive Ion Etching

著者名:
掲載資料名:
Specimen preparation for transmission electron microscopy of materials--II : symposium held April 19-20, 1990, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
199
発行年:
1990
開始ページ:
43
終了ページ:
50
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990883 [1558990887]
言語:
英語
請求記号:
M23500/199
資料種別:
国際会議録

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