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FLUORINATED SILICON NITRIDE (A-Si:N,F,H) FILMS USING NF3 FOR AMORPHOUS SILICON BASED SOLAR CELLS

著者名:
Goh, F. H., C.
Tan, S. M.
Ng, K.
Naseem, H. A.
Brown,. W. D.
Hermann, A. M
さらに 1 件
掲載資料名:
Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
192
発行年:
1990
開始ページ:
75
終了ページ:
80
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990814 [155899081X]
言語:
英語
請求記号:
M23500/192
資料種別:
国際会議録

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