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THE ASPECTS OF THERMAL ANNEAL TO INTRINSIC STRESS AND MICROSTRUCTURE OF MULTILAYER THIN FILMS

著者名:
掲載資料名:
Interfaces between polymers, metals, and ceramics : symposium held April 25-27, 1989, San Diego, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
153
発行年:
1989
開始ページ:
291
終了ページ:
298
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990265 [1558990267]
言語:
英語
請求記号:
M23500/153
資料種別:
国際会議録

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