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CORRELATING CVD PROCESS PARAMETERS AND FILM PROPERTIES

著者名:
Chow, D. K.  
掲載資料名:
Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
187
発行年:
1990
開始ページ:
203
終了ページ:
210
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990760 [1558990763]
言語:
英語
請求記号:
M23500/187
資料種別:
国際会議録

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