CMOS POLYSILICON THIN FILM TRANSISTORS WITH SIMULTANEOUSLY DEPOSITED LAYERS FOR SOURCE-DRAIN AND GATE
- 著者名:
Huang, T. Y. Tsai, C. C. Wu, I. W. Lewis, A. G. Chiang, A. Bruce, R. H. - 掲載資料名:
- Polysilicon thin films and interfaces
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 182
- 発行年:
- 1990
- 開始ページ:
- 375
- 終了ページ:
- 380
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990715 [1558990712]
- 言語:
- 英語
- 請求記号:
- M23500/182
- 資料種別:
- 国際会議録
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