Blank Cover Image

GROWTH OF MONOCRYSTALLINE CoSi2 ON CoSi2 SEEDS IN (100)Si

著者名:
Maex, Karen  
掲載資料名:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
181
発行年:
1990
開始ページ:
111
終了ページ:
116
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
言語:
英語
請求記号:
M23500/181
資料種別:
国際会議録

類似資料:

1 国際会議録 Controlling CoSi2 Nucleation: The Effect Of Entropy Of Mixing

Detavernier, Christophe, Van Meirhaeghe, Roland L., Maex, Karen, Cardon, Felix

Materials Research Society
7 国際会議録 Growth of Epitaxial CoSi2 From Cobalt Carbonyl on Si(100) Substrate

Singanamalla, R., Greve, D.W., Barmak, K.

Materials Research Society
2 国際会議録 Silicide Engineering: Influence Of Alloying Elements On CoSi2 Nucleation

Detavernier, Christophe, Van Meirhaeghe, Roland L., Maex, Karen, Cardon, Felix

Materials Research Society
8 国際会議録 GROWTH OF BURIED CoSi2 LAYERS IN Si(100) BY MOLECULAR BEAM ALLOTAXY

Mantl, S., Bay, H. L., Michel, I., Mesters, S., Trinkaus, H.

MRS - Materials Research Society
3 国際会議録 GROWTH OF THIN EPITAXIAL CoSi2 LAYERS ON Si (100)

Yalisove, S.M., Tung, R.T., Batstone, J.L.

Materials Research Society
9 国際会議録 In Situ Growth and Growth Kinetics of Epitaxial (100) CoSi2 Layer on (100) Si by Reactive Chemical Vapor Deposition

Rhee, Hwa Sung, Lee, Heui Seung, Park, Jong Ho, Ahn, Byung Tae

Materials Research Society
4 国際会議録 ELECTRICAL CHARACTERISATION OF EPITAXIAL (100) CoSi2/Si CONTACTS OBTAINED USING A Ti/Co BILAYER

Lauwers, A., Vercaemst, A., Hove, M. Van, Larsen, K. Kyllesbech, Verbeeck, R., Meirhaeghe, R. Van, Maex, K., Rossum, M. …

MRS - Materials Research Society
10 国際会議録 CoSi2 Formation Using a Ti Capping Layer - The Influence of Processing Conditions on CoSi2 Nucleation

Detavernier, C., Meirhaeghe, R.L. Van, Maex, K.

Materials Research Society
5 国際会議録 SUBSURFACE GROWTH OF CoSi2 BY DEPOSITION OF Co ON Si-CAPPED CoSi2 SEED REGIONS

Fathauer, R.W., George, T., Pike, W.T.

Materials Research Society
11 国際会議録 GROWTH OF CoSi2/Si SUPERLATTICES

Henz J., Ospelt M., Kanel Von H.

Kluwer Academic Publishers
6 国際会議録 CHARACTERIZATION OF EPITAXIAL CoSi2 FILM GROWTH ON Si(100) BY SLOW POSITRON BEAM

Liu, Ping, Lin, Chenglu, Zhou, Zuyao, Weng, Huiming, Li, Bingzong, Han, Rongdian, Zou, Shichang

MRS - Materials Research Society
12 国際会議録 Deep Levels in Silicon as a Result of CoSi2 Formation

Lu,L.W., Groeseneken,G., Hove,L.Van den, Maex,K.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12