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INFLUENCE OF IMPURITIES AND MICROSTRUCTURE ON THE RESISTIVITY OF LPCVD TITANIUM NITRIDE FILMS

著者名:
掲載資料名:
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
168
発行年:
1990
開始ページ:
199
終了ページ:
206
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990562 [1558990569]
言語:
英語
請求記号:
M23500/168
資料種別:
国際会議録

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