POLYHYRIDE BONDING GROUPS IN PECVD AMORPHOUS Si THIN FILMS

POLYHYRIDE BONDING GROUPS IN PECVD AMORPHOUS Si THIN FILMS

著者名:

掲載資料名:

Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

165

発行年:

1990

開始ページ:

173

終了ページ:

180

総ページ数:

8

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990531 [1558990534]

言語:

英語

請求記号:

M23500/165

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015649
シリーズID:	PA00000011
会議名:	Symposium on Characterization of plasma-enhanced CVD processes
回次:	1989
会議開催地:	Boston, Massachusetts, USA
会議開催年:	1989.11.27-1989.11.28

類似資料:

1 国際会議録 ANNEALING OF IRREVERSIBLE DEFECTS IN HYDROGENATED AND UNHYDROGENATED AMORPHOUS SILISON THIN FILMS Parsons, G. N., Wang, C., Lucovsky, G. Materials Research Society	7 国際会議録 ELECTRONIC STATES IN THE GAP OF a-Si FROM BOND ANGLE VARIATIONS Davidson, B. N., Lucovsky, G. Materials Research Society
2 国際会議録 NITROGEN INCORPORATION IN a-Si, N:H ALLOY FILMS PRODUCED BY REMOVE PECVD Parsons, G.N., Lucovsky, G. Materials Research Society	8 国際会議録 RAMAN SCATTERING FROM MICROCRYSTALLINE FILMS: CONSIDERATIONS OF COMPOSITE STRUCTURES WITH DIFFERENT OPTICAL ABSORPTION PROPERTIES Nemanich, R.J., Buehler, E.C., LeGrice, Y.M., Shroder, R.E., Parsons, G.N., Wang, C., Lucovsky, G., Boyce, J.B. Materials Research Society
3 国際会議録 ENERGY DIFFERENCES BETWEEN THE Si AND THE Ge DANGLING BOND DEFECTS IN a-Si1-XGeX Alloys Cho, S.M., Davidson, B.N., Lucovsky, G. Materials Research Society	9 国際会議録 CHEMICAL REACTION PATHWAYS FOR THE DEPOSITION OF AMORPHOUS SILICON-HYDROGEN ALLOYS BY REMOTE PLASMA ENHANCED CVD Parsons, G.N., Tsu, D.V., Lucovsky, G. Materials Research Society
4 国際会議録 FORMATION OF MICROCRYSTALLINE SILICON FILM BY RMS PROCES Wang, Cheng, Parsons, G.N., Buehler, E.C., Memanich, R.J., Lucovsky, G. Materials Research Society	10 国際会議録 GROWTH OF a-Si:H FILMS BY REMOTE PLASMA ENHANCED CVD (RPECVD) Parsons, G.N., Tsu, D.V., Lucovsky, G. Materials Research Society
5 国際会議録 a-Si:H THIN FILM TRANSISTORS AND LOGIC CIRCUITS FABRICATED IN AN INTEGRATED MULTICHAMBER SYSTEM Kim, S. S., Wang, C., Parsons, G. N., Lucovsky, G. Materials Research Society	11 国際会議録 THE EFFECTS OF SURFACE AND INTERFACE DEPLETION REGIONS ON THE PHOTOCONDUCTIVITY OF a-Si:H IN SURFACE CELL STRUCTURES Parson, G.N., Kusano, C., Lucovsky, G. Materials Research Society
6 国際会議録 THE EFFECT OF WATER VAPOR AND OXYGEN IN THE PROCESSING ENVIRONMENT ON THE PROPERTIES OF SPUTTERED a-Si:H FILMS Wang, C., Parsons, G. N., Lucovsky, G. Materials Research Society	12 国際会議録 EFFECT OF THE LOCAL DISORDER IN a-Si ON THE ELECTRONIC DENSITY OF STATES AT THE BAND EDGES Davidson, B.N., Lucovsky, G., Bernholc, J. Materials Research Society

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