MICROCRYSTAL Si FILMS PREPARED BY REMOTE PLASMA CVD
- 著者名:
Kim, Sung Chul Hwang, Jung Tae Lee, Seung Kyu Jung, Chang Young Soe, Sung Moo Koh, Sung Ok Chung, Kwan Soo Jang, Jin - 掲載資料名:
- Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 164
- 発行年:
- 1990
- 開始ページ:
- 171
- 終了ページ:
- 176
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990524 [1558990526]
- 言語:
- 英語
- 請求記号:
- M23500/164
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
American Institute of Chemical Engineers |
Materials Research Society |
8
国際会議録
Controls of Crystallinity and Surface Roughness of Cu Film in Partially lonized Beam Deposition
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
American Society of Mechanical Engineers | |
SPIE - The International Society of Optical Engineering |
Plenum Press |
Materials Research Society |
MRS - Materials Research Society |