CARBON-SILICON HETEROJUNCTION DIODES FORMED BY CH4/Ar RF PLASMA THIN FILM DEPOSITION ON Si SUBSTRATES
- 著者名:
Amaratunga, G.A.J. Milne, W.I. Putnis, A. Chan, K.K. Clay, K.J. Welland, M.E. - 掲載資料名:
- Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 162
- 発行年:
- 1990
- 開始ページ:
- 377
- 終了ページ:
- 382
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990500 [155899050X]
- 言語:
- 英語
- 請求記号:
- M23500/162
- 資料種別:
- 国際会議録
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