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As AND B ION IMPLANTATION THROUGH Mo AND INTO Mo-SILICIDE LAYERS FOR SHALLOW JUNCTION FORMATION

著者名:
Angelucci, R.
Merli, M.
Solmi, S.
Armigliato, A.
Gabilli, E.
Govoni, D.
Poggi, A.
さらに 2 件
掲載資料名:
Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
157
発行年:
1990
開始ページ:
751
終了ページ:
758
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990456 [1558990453]
言語:
英語
請求記号:
M23500/157
資料種別:
国際会議録

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