SUBSTRATE INTERACTIONS IN THE FORMATION OF AMORPHOUS SILICON/DIELECTRIC INTERFACES

SUBSTRATE INTERACTIONS IN THE FORMATION OF AMORPHOUS SILICON/DIELECTRIC INTERFACES

著者名:

掲載資料名:

Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

149

発行年:

1989

開始ページ:

265

終了ページ:

270

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990227 [1558990224]

言語:

英語

請求記号:

M23500/149

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015634
シリーズID:	PA00000011
会議名:	Symposium on amorphous silicon technology
回次:	1989
会議開催地:	San Diego, CA, USA
会議開催年:	1989.04.25-1989.04.28

類似資料:

1 国際会議録 CORE AND VALENCE LEVELS IN HYDROGENATED AMORPHOUS SILICON Burnham, N.A., Fisher, R.F., Asher, S.E., Kazmerski, L.L., Lucovsky, G., Parsons, G.N. Materials Research Society	7 国際会議録 THE EFFECTS OF SURFACE AND INTERFACE DEPLETION REGIONS ON THE PHOTOCONDUCTIVITY OF a-Si:H IN SURFACE CELL STRUCTURES Parson, G.N., Kusano, C., Lucovsky, G. Materials Research Society
2 国際会議録 CHEMICAL REACTION PATHWAYS FOR THE DEPOSITION OF AMORPHOUS SILICON-HYDROGEN ALLOYS BY REMOTE PLASMA ENHANCED CVD Parsons, G.N., Tsu, D.V., Lucovsky, G. Materials Research Society	8 国際会議録 *CONTROL OF BONDED SiH IN SILICON OXIDES DEPOSITED BY REMOTE PLASMA ENHANCED CVD Tsu, D. V., Parsons, G. N., Lucovsky, G., Watkins, M. W. Materials Research Society
3 国際会議録 a-Si:H THIN FILM TRANSISTORS AND LOGIC CIRCUITS FABRICATED IN AN INTEGRATED MULTICHAMBER SYSTEM Kim, S. S., Wang, C., Parsons, G. N., Lucovsky, G. Materials Research Society	9 国際会議録 ESTIMATION OF DEFECT STATE DENSITIES FROM BULK PHOTOELECTRONIC PROPERTIES OF A-SI,Ge:H ALLOYS Parsons, G. N., Lucovsky, G. Materials Research Society
4 国際会議録 ANNEALING OF IRREVERSIBLE DEFECTS IN HYDROGENATED AND UNHYDROGENATED AMORPHOUS SILISON THIN FILMS Parsons, G. N., Wang, C., Lucovsky, G. Materials Research Society	10 国際会議録 FORMATION OF DIVICE QUALITY Si/SiO2 INTERFACES IN A MULTICHAMBER INTEGRATED PROCESSING SYSTEM Kim, S. S., Tsu, D. V., Lucovsky, G., Fountain., G. G., Markunas, R. J Materials Research Society
5 国際会議録 FORMATION OF MICROCRYSTALLINE SILICON FILM BY RMS PROCES Wang, Cheng, Parsons, G.N., Buehler, E.C., Memanich, R.J., Lucovsky, G. Materials Research Society	11 国際会議録 Nitrided Silicon Oxide Gate Dielectrics for Submicron Device Technology Lucovsky, G. MRS - Materials Research Society
6 国際会議録 Bonded Hydrogen Atom Participation in Metastable Defect Formation in Hydrogenated Amorphous Silicon Lucovsky, G., Yang, H. MRS - Materials Research Society	12 国際会議録 POLYHYRIDE BONDING GROUPS IN PECVD AMORPHOUS Si THIN FILMS Davidson, B.N., Parsons, G.N., Wang, C., Lucovsky, G. Materials Research Society

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