*SOME APPLICATIONS OF ION BEAMS IN III-V COMPOUND SEMI-CONDUCTOR DEVICE FABRICATION
- 著者名:
Doonelly, J. P. Anderson, K.K. Woodhouse, J. D. Goodhue, W. D. Yap. D. Gaidis, M. C., Wang, C. A - 掲載資料名:
- Advances in materials, processing, and devices in III-V compound semiconductors
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 144
- 発行年:
- 1989
- 開始ページ:
- 421
- 終了ページ:
- 432
- 総ページ数:
- 12
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990173 [1558990178]
- 言語:
- 英語
- 請求記号:
- M23500/144
- 資料種別:
- 国際会議録
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