ENHANCED AND RETARDED DIFFUSION OF SHALLOW IMPURITIES IN SILICON

ENHANCED AND RETARDED DIFFUSION OF SHALLOW IMPURITIES IN SILICON

著者名:

掲載資料名:

Atomic scale calculations in materials science : symposium held November 28-December 1, 1988, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

141

発行年:

1989

開始ページ:

243

終了ページ:

248

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990142 [1558990143]

言語:

英語

請求記号:

M23500/141

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015626
シリーズID:	PA00000011
会議名:	Symposium on atomic scale calculations in materials science
回次:	1988
会議開催地:	Boston, MA, USA
会議開催年:	1988.11.28-1988.12.01

類似資料:

1 国際会議録 Hydrogen Diffusion and Passivation of Shallow Impurities in Crystalline Silicon Denteneer,P.J.H., Walle,C.G.Van de, Bar-Yam,Y., Pantelides,S.T. Trans Tech Publications	7 国際会議録 HYDROGEN DIFFUSION AND HYDROGEN-DOPANT REACTIONS IN CRYSTALLINE SILICON. PANTELIDES,S.T. Trans Tech Publications
2 国際会議録 THEORY OF HYDROGEN REACTIONS IN SILICON Van de Walle, C. G., Bar-Yam, Y., Pantelides, S. T. Materials Research Society	8 国際会議録 *ATOMIC DIFFUSION PROCESSES IN SILICON Pantelides, Sokrates T. Materials Research Society
3 国際会議録 Fluorine-Silicon Reactions and the Etching of Crystalline Silicon Walle,C.G.Van de, McFeely,F.R., Pantelides,S.T. Trans Tech Publications	9 国際会議録 Cooperative Chemical Rebonding in the Segregation of Impurities in Silicon Grain Boundaries Maiti, A., Chisholm, M. F., Pennycook, S. J., Pantelides, S. T. MRS - Materials Research Society
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5 国際会議録 *DEFECT REACTIONS AND ATOMIC DIFFUSION IN SILICON Pantelides, S.T. Materials Research Society	11 国際会議録 IMPURITY-DEFECT COMPLEXES IN HYDROGENATED AMORPHOUS SILICON Yang, Lin H., Fong, C.Y., Nichols, Carol S. Materials Research Society
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