THE EFFECT OF DOPING ON THE GRAIN STRUCTURE OF AS-DEPOSITED AND HIGH-TEMPERATURE ANNEALED LPCVD WSi2 FILMS ON POLYSILICON

THE EFFECT OF DOPING ON THE GRAIN STRUCTURE OF AS-DEPOSITED AND HIGH-TEMPERATURE ANNEALED LPCVD WSi2 FILMS ON POLYSILICON

著者名:

掲載資料名:

Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

138

発行年:

1989

開始ページ:

421

終了ページ:

426

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990111 [1558990119]

言語:

英語

請求記号:

M23500/138

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015623
シリーズID:	PA00000011
会議名:	Symposium on characterization of the structure and chemistry of defects in materials
回次:	1988
会議開催地:	Boston, MA, USA
会議開催年:	1988.11.28-1988.12.03

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2 国際会議録 DEGRADATION OF TiSi2/n+-POLYSILICON INTERFACES DUE TO HIGH TEMPERATURE PROCESSING Shenai, K., Piacente, P. A., Smith, G. A., Lewis, N., McConnell, M . D., Norton, J. F., Hall, E. L., Baliga, B. J. Materials Research Society	8 国際会議録 THE EFFECT OF TEMPERATURE AND PRESSURE ON RESIDUAL STRESS IN LPCVD POLYSILICON FILMS Oei, D-G., McCarthy, S.L. Materials Research Society
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6 国際会議録 THE EFFECT OF DEPOSITION TEMPERATURE ON THE MICROSTRUCTURE OF LPCVD POLYSILICON FILMS Hangas, J., Liu, D. R., Oei, D. G., McCarthy, S. L., Peters, C. Materials Research Society	12 国際会議録 STABILITY OF NANCOSCALE COBALT SILICDE FILM FORMATION ON POLYSILICON Pramanick, S., Erokhin, Yu N., Patnaik, B. K., Rozgonyi, G.A., Gambino, J. P. Materials Research Society

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