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DISLOCATIONS AND BUBBLES IN BF+2 IMPLANTED SILICON

著者名:
Pike, G.E.
Carr, M.J.
Schubert, W.K.
Hills, C.R.
Nelson, G.C.
McWhorter, P.J.
さらに 1 件
掲載資料名:
Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
138
発行年:
1989
開始ページ:
227
終了ページ:
232
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990111 [1558990119]
言語:
英語
請求記号:
M23500/138
資料種別:
国際会議録

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