INFLUENCE OF DOPANT TYPE AND CONCENTRATION ON HYDROGEN DIFFUSION IN SILICON

INFLUENCE OF DOPANT TYPE AND CONCENTRATION ON HYDROGEN DIFFUSION IN SILICON

著者名:

掲載資料名:

Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

138

発行年:

1989

開始ページ:

209

終了ページ:

214

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990111 [1558990119]

言語:

英語

請求記号:

M23500/138

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015623
シリーズID:	PA00000011
会議名:	Symposium on characterization of the structure and chemistry of defects in materials
回次:	1988
会議開催地:	Boston, MA, USA
会議開催年:	1988.11.28-1988.12.03

類似資料:

1 国際会議録 HYDROGEN DIFFUSION AND COMPLEX FORMATION IN SILICON Borenstein, J.T., Tulchinski, D., Corbett, J.W. Materials Research Society	7 国際会議録 The Influence of Damage and Dopant on the Blister Formation in Hydrogen Implanted Silicon Hochbauer, T., Nastasi, M., Lau, S. S., Zheng, Y., Mayer, J. W. MRS - Materials Research Society
2 国際会議録 Effect of multiple trapping on hydrogen diffusion in silicon Borenstein,J.T., Corbett,J.W., Pearton,S.J. Trans Tech Publications	8 国際会議録 Concentration Dependence of Hydrogen Diffusion in Hydrogenated Silicon Beyer, W., Zastrow, U MRS - Materials Research Society
3 国際会議録 FORMATION KINETICS OF THERMAL DONORS IN SILICON Borenstien, Jeffrey T., Peak, David, Corbett, James W. Materials Research Society	9 国際会議録 Defect-Induced Shifts in the Elastic Constants of Silicon Allred, Clark L., Borenstein, Jeffrey T., Weinberg, Marc S., Yuan, Xianglong, Bazant, Martin Z., Hobbs, Linn W. Materials Research Society
4 国際会議録 A UNIFIED TREATMENT OF THERMAL DONOR HIERARCHIES IN SILICON AND GERMANIUM Borenstien, Jeffrey T., Corbett, James W. Materials Research Society	10 国際会議録 Diffusion Behavior of Ion-Implanted n-type Dopants in Silicon Germanium Eguchi, S., Leitz, C.W., Fitzgerald, E.A., Hoyt, J.L. Materials Research Society
5 国際会議録 Long-range correlations and hydrogen diffusion in silicon Corbett,J.W., Verner,I.V. Trans Tech Publications	11 国際会議録 Dopant Diffusion in Amorphous Silicon Duffy, R., Venezia, V.C., Heringa, A., Hopstaken, M.J.P., Maas, G.C.J., Dao, T., Tamminga, Y., Roozeboom, F. Materials Research Society
6 国際会議録 HYDROGEN DIFFUSION AND HYDROGEN-DOPANT REACTIONS IN CRYSTALLINE SILICON. PANTELIDES,S.T. Trans Tech Publications	12 国際会議録 *HYDROGEN IN SILICON Corbett, J. W., Lindstorm, J. L., Pearton, S. J. Materials Research Society

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