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LASER STUDIES OF THE SiH RADICAL/SURFACE INTERACTION DURING DEPOSITION OF A THIN A THIN FILMS

著者名:
掲載資料名:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
131
発行年:
1989
開始ページ:
233
終了ページ:
238
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990043 [1558990046]
言語:
英語
請求記号:
M23500/131
資料種別:
国際会議録

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