CHEMISORPTION OF HF ON SILICON SURFACES

CHEMISORPTION OF HF ON SILICON SURFACES

著者名:

掲載資料名:

Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

131

発行年:

1989

開始ページ:

185

終了ページ:

190

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990043 [1558990046]

言語:

英語

請求記号:

M23500/131

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015616
シリーズID:	PA00000011
会議名:	Symposium on chemical perspectives of microelectronic materials
回次:	1988
会議開催地:	Boston, MA, USA
会議開催年:	1988.11.30-1988.12.02

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