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PRINCIPLE AND APPLICATIONS OF WAFER CURVATURE TECHNIQUES FOR STRESS MEASUREMENTS IN THIN FILMS

著者名:
Flinn, Paul A,  
掲載資料名:
Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
130
発行年:
1989
開始ページ:
41
終了ページ:
52
総ページ数:
12
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990036 [1558990038]
言語:
英語
請求記号:
M23500/130
資料種別:
国際会議録

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