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A HIGH DEPTH RESOLUTION BACKSIDE SECONDARY ION MASS SPECTROMETRY TECHNIQUE USED FOR STUDYING METAL/GaAs CONTACTS

著者名:
Palmstrom, C.J.
Schwarz, S.A.
Marshall, E.D.
Yablonovitch, E.
Harbison, J.P.
Schwartz, C.L.
Florez, L.
Gmitter, T.J.
Wang, L.C.
Lau, S.S.
さらに 5 件
掲載資料名:
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
126
発行年:
1988
開始ページ:
283
終了ページ:
288
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837968 [0931837960]
言語:
英語
請求記号:
M23500/126
資料種別:
国際会議録

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