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ON THE ADHESION OF LPCVD WSi2 TO DOPED AND UNDOPED POLYSILICON

著者名:
Shenai, K.
Piacente, P.A.
Lewis, N.
McConnell, M.D.
Smith, G.A.
Baliga, B.J.
さらに 1 件
掲載資料名:
Adhesion in solids : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
119
発行年:
1988
開始ページ:
177
終了ページ:
184
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837968 [0931837960]
言語:
英語
請求記号:
M23500/119
資料種別:
国際会議録

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