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TRANSITION FROM AMORPHOUS TO CRYSTALLINE SILICON: EFFECT OF HYDROGEN ON FILM GROWTH

著者名:
Tsai, C.C.
Thompson, R.
Doland, C.
Ponce, F.A.
Anderson, G.B.
Wacker, B.
さらに 1 件
掲載資料名:
Amorphous silicon technology : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
118
発行年:
1988
開始ページ:
49
終了ページ:
54
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837883 [093183788X]
言語:
英語
請求記号:
M23500/118
資料種別:
国際会議録

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