*AN INVESTIGATION OF THE HETEROEPITAXIAL GROWTH OF BETA-SILICON CARBIDE THIN FILMS ON SILICON SUBSTRATES
- 著者名:
- 掲載資料名:
- Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 116
- 発行年:
- 1988
- 開始ページ:
- 337
- 終了ページ:
- 350
- 総ページ数:
- 14
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837869 [0931837863]
- 言語:
- 英語
- 請求記号:
- M23500/116
- 資料種別:
- 国際会議録
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