*AN INVESTIGATION OF THE HETEROEPITAXIAL GROWTH OF BETA-SILICON CARBIDE THIN FILMS ON SILICON SUBSTRATES

*AN INVESTIGATION OF THE HETEROEPITAXIAL GROWTH OF BETA-SILICON CARBIDE THIN FILMS ON SILICON SUBSTRATES

著者名:

掲載資料名:

Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

116

発行年:

1988

開始ページ:

337

終了ページ:

350

総ページ数:

14

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837869 [0931837863]

言語:

英語

請求記号:

M23500/116

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015601
シリーズID:	PA00000011
会議名:	Symposium on heteroepitaxy on silicon
回次:	1988
会議開催地:	Reno, NV, USA
会議開催年:	1988.04.05-1988.04.08

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1 国際会議録 AMORPHIZATION AND RECRYSTALLIZATION PROCESSES IN MONOCRYSTALLINE BETA SILICON CARBIDE THIN FILMS Edmond, J.A., Withrow, S.P., Kong, H.S., Davis, R.F. Materials Research Society	7 国際会議録 RAPID THERMAL ANNEALING OF Al AND P IMPLANTED SINGLE CRYSTAL BETA SILICON CARBIDE THIN FILMS Edmond, J.A., Kim, M.J., Davis, R.F. Materials Research Society
2 国際会議録 GROWTH AND CHARACTERIZATION OF CHEMICALLY VAPOR DEPOSITED BETA-SiC EPILAYERS ON 6H ALPHA-SiC SUBSTRATES Kong, H.S., Glass, J.T., Davis, R.F., Nutt, S.R. Materials Research Society	8 国際会議録 Peudeo-EpitaxyTM process for Aluminum Gallium Nitride Thin Films on Silicon Carbide Substrates via Metalorganic Chemical Vapor Deposition Gehrke, T., Linthicum, K. J., Rajagopal, P., Preble, E. A., Carlson, E. P., Robin, B. M., Davis, R. F. Trans Tech Publications
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4 国際会議録 HIGH TEMPERATURE IMPLANTATION OF SINGLE CRYSTAL BETA SILICON CARBIDE THIN FILMS Edmond, J.A., Withrow, S.P., Wadlin, W., Davis, R.F. Materials Research Society	10 国際会議録 GROWTH AND CHARACTERIZATION OF HETEROEPITAXIAL NICKEL FILMS ON DIAMOND SUBSTRATES Humphreys, T.P., Jeon, Hyeongtag, Nemanich, R.J., Posthill, J.B., Rudder, R.A., Malta, D.P., Hudson, G.C., Markunas, … Materials Research Society
5 国際会議録 CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY OF DEFECTS IN BETA SILICON CARBIDE THIN FILMS Carter Jr., C. H., Edmond, J. A., Palmour, J. W., Ryu, J., Kim, H. J., Davis, R. F. Materials Research Society	11 国際会議録 The Growth and Characterization of Large Diameter Silicon Carbide Substrates Gupta, A., Yoganathan, M., Burton, J., Byrd, N., Dimondi, A., Edwards, S., Giordana, A., Glesener, J., Harding, J., … Materials Research Society
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