*SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION

*SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION

著者名:

掲載資料名:

Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

107

発行年:

1988

開始ページ:

3

終了ページ:

16

総ページ数:

14

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837753 [0931837758]

言語:

英語

請求記号:

M23500/107

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015593
シリーズID:	PA00000011
会議名:	Symposium on silicon-on-insulator and buried metals in semiconductors
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.11.30-1987.12.03

類似資料:

1 国際会議録 *SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION White, Alice E., Short, K. T., Dynes, R. C., Gibson, J. M., Hull. R. Materials Research Society	7 国際会議録 BURIED SILICIDE SYNTHESIS AND STRAIN IN COBALT-IMPLANTED SILICON Barbour, J. C., Picrauz, S. T., Doyle, B. L. Materials Research Society
2 国際会議録 MESOTAXY: GROWTH OF BURIED SINGLE-CRYSTAL CoSi2 LAYERS BY IMPLANTATION White, Alice E., Short, K.T., Dynes, R.C., Garno, J.P., Gibson, J.M. Materials Research Society	8 国際会議録 The Structure of Ion-Implanted Amorphous Silicon Gibson, J. M., Cheng, J-Y., Voyles, P., Treacy, M. M. J., Jacobson, D. C. MRS - Materials Research Society
3 国際会議録 MESOTAXY: SINGLE-CRYSTAL GROWTH OF BURIED SILICIDE LAYERS White, Alice E.., Short, K.. T., Dynes, R. C., Garno, J. P., Gibson, J. M. Materials Research Society	9 国際会議録 ION-BEAM-INDUCED DESTRUCTION OF SUPERCONDUCTING PHASE COHERENCE IN YBa2Cu3O7-δ White, Alice E., Short, K. T., Jacobson, D. C., Poate, J. M., Dynes, R. C., Mankiewich, P. M., Skocpol, W. J., Howard, … Materials Research Society
4 国際会議録 COMPARISON OF CONDUCTIVITY PRODUCED IN POLYMERS AND CARBON FILMS BY PYROLYSIS AND HIGH ENERGY ION IRRADIATION Venkatesan, T., Dynes, R. C., Wilkens, B., White, A. E., Gibson, J. M., Hamm. R. North-Holland	10 国際会議録 ION BEAM SYNTHESIS OF BURIED SINGLE CRYSTAL ERBIUM SILICIDE Golanski, A., Feenstra, R., Galloway, M.D., Park, J.L., Pennycook, S.J., Harmon, H.E., White, C.W. Materials Research Society
5 国際会議録 MICROSTRUCTURAL CHARACTERIZATION OF HIGH DOSE OXYGEN IMPLANTED SILICON Batstone, J.L., White, Alice E., Short, K..T., Gibson, J.M., Jacobson, D.C. Materials Research Society	11 国際会議録 Microstructure and Size Distribution of Compound Semiconductor Nanocrystals Synthesized by Ion Implantation Meldrum, A., Withrow, S. P., Zuhr, R. A., White, C. W., Boatner, L. A., Budai, J. D., Anderson, I. M., Henderson, D. O., … MRS - Materials Research Society
6 国際会議録 BURIED SILICIDE SYNTHESIS AND STRAIN IN COBALT-IMPLANTED SILICON Barbour, J. C., Picrauz, S. T., Doyle, B. L. Materials Research Society	12 国際会議録 INTERFACIAL STRUCTURE AND STABILITY IN GeXSil-X/Si STRAINED LAYERS Hull, R., Bean, J. C., Gibson, J. M., Marcantonio, K. J., Fiory, A. T., Nakahara, S. Materials Research Society

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