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DEGRADATION OF TiSi2/n+-POLYSILICON INTERFACES DUE TO HIGH TEMPERATURE PROCESSING

著者名:
Shenai, K.
Piacente, P. A.
Smith, G. A.
Lewis, N.
McConnell, M . D.
Norton, J. F.
Hall, E. L.
Baliga, B. J.
さらに 3 件
掲載資料名:
Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
106
発行年:
1988
開始ページ:
149
終了ページ:
154
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837746 [093183774X]
言語:
英語
請求記号:
M23500/106
資料種別:
国際会議録

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