KINETIC MODELING OF GRAIN GROWTH IN POLYCRYSTALLINE SILICON FILMS DOPED WITH PHOSPHORUS AND BORON

KINETIC MODELING OF GRAIN GROWTH IN POLYCRYSTALLINE SILICON FILMS DOPED WITH PHOSPHORUS AND BORON

著者名:

掲載資料名:

Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

106

発行年:

1988

開始ページ:

143

終了ページ:

148

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837746 [093183774X]

言語:

英語

請求記号:

M23500/106

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015592
シリーズID:	PA00000011
会議名:	Symposium on polysilicon films and interfaces
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.12.01-1987.12.03

類似資料:

1 国際会議録 *GRAIN GROWTH IN POLYCRYSTALLINE SILICON FILMS Thompson, C. V. Materials Research Society	7 国際会議録 Modelling of Grain Growth in Thin Film Strips Walton,D.T., Frost,H.J., Thompson,C.V. Trans Tech Publications
2 国際会議録 MODELLING OF THIN FILM GRAIN STRUCTURES AND GRAIN GROWTH Frost, H.J., Thompson, C.V. Materials Research Society	8 国際会議録 PIEZORESISTIVE PROPERTIES OF BORON-DOPED PECVD MICRO- AND POLYCRYSTALLINE SILICON FILMS Berre, M. Le, Lemiti, M., Barbier, D., Pinard, P., Cali, J., Bustarret, E., Bruyere, J. -C., Sicart, J., Robert, J. L. MRS - Materials Research Society
3 国際会議録 Hydrogen Transport in Phosphorus and Boron Doped Polycrystalline Silicon Kaiser, N. H. NickelI. Materials Research Society	9 国際会議録 Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films Baumgart, H., Leamy, H.J., Trimble, L.E., Doherty, C.J., Celler, G.K. North-Holland
4 国際会議録 THE EFFECTS OF DOPANTS ON SURFACE-ENERGY-DRIVEN SECONDARY GRAIN GROWTH IN ULTRATHIN Si FILMS Kim, H.-J., Thompson, C.V. Materials Research Society	10 国際会議録 THE EFFECT OF SOLUTE DRAG ON GRAIN GROWTH IN THIN FILMS Frost, H. J., Hayashi, Y., Thompson, C. V., Walton, D. T. MRS - Materials Research Society
5 国際会議録 Improvement of Grain Growth and Surface Roughness in Laser-Crystallized Polycrystalline Silicon Films Choi, H-S., Park, C-M., Jeon, J-H., Min, B-H., Han, M-K. MRS - Materials Research Society	11 国際会議録 Silicon-Hydrogen Bonds in Boron and Phosphorous Doped Polycrystalline Silicon Thin Films Saleh, R., Nickel, N.H. Materials Research Society
6 国際会議録 GRAIN GROWTH IN POLYCRYSTALLINE THIN FILMS Thompson, Carl V. MRS - Materials Research Society	12 国際会議録 PHOSPHORUS AND BORON DOPING OF SILICON THIN FILMS USING ArF EXCIMER LASER Slaoui, A., Pattyn, H., Fogarassy, E., De Unamuno, S., Stuck, R. Materials Research Society

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